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Engineering, 28.05.2021 23:40 cj31150631
The viscous PDMS (Polydimethylsiloxane) coated on the glass
(Sylagard 184, Dowcoaning) is using the spin coating material. If we fix
the viscosity, density of coating material, initial thickness at 4000 cP, 965
kg/m3 and 0.105 cm, and then, the rotation time is fixed at time of 300s
and the rotation of device start from 500 to 6000 RPM. Calculate the final
thickness of the film at angular speed from 500-6000rpm (step by
500rpm) and draw the relationship between the final thickness (h) and
angular speed (ω).
CAN ANY ONE HELP
LAB OF MEMS DESIGN
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The viscous PDMS (Polydimethylsiloxane) coated on the glass
(Sylagard 184, Dowcoaning) is using the...
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